Electromagnetic alignment and scanning apparatus

Details Electromagnetic alignment and scanning apparatus Electromagnetic alignment and scanning apparatus

2005-08-25

2009-08-11

Ro, Bentsu (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C248S317000, C248S364000

Reexamination Certificate

active

07573225

ABSTRACT:
An exposure apparatus that irradiates an energy beam to a substrate includes a projection optical system that projects the energy beam to the substrate, and a support device having a flexible structure to support the projection optical system. According to one embodiment, the flexible structure includes three flexible rods that support the projection optical system from an upper side of the projection optical system. According to an embodiment, extended lines of the respective rods cross at a reference point of the projection optical system.

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