Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate
2006-03-14
2006-03-14
Ro, Bentsu (Department: 2837)
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
C318S611000, C250S492200, C430S311000
Reexamination Certificate
active
07012398
ABSTRACT:
A scanning exposure method moves a mask stage in a scanning direction by a driver having a first portion coupled to the mask stage, which includes a reflective portion positioned along the scanning direction. A counter weight having at least one beam extending along the scanning direction, moves in a direction opposite to the mask stage in response to a reaction force generated by movement of the mask stage by the driver. The at least one beam of the counter weight is coupled to a second portion of the driver. The counter weight is movably supported via a first bearing by a base member. The movement of the counter weight is guided in the scanning direction via a second bearing by a guide mounted on the base member and extending along the scanning direction. A length of the guide is longer than a length of the reflective portion.
REFERENCES:
patent: RE27289 (1972-02-01), Sawyer
patent: RE27436 (1972-07-01), Sawyer
patent: 3789285 (1974-01-01), Nishizawa
patent: 3889164 (1975-06-01), Nishizawa et al.
patent: 3935486 (1976-01-01), Nagashima
patent: 4019109 (1977-04-01), McCoy et al.
patent: 4087729 (1978-05-01), Yamazaki et al.
patent: 4129291 (1978-12-01), Kato et al.
patent: 4234175 (1980-11-01), Sato et al.
patent: 4392642 (1983-07-01), Chitayat
patent: 4409860 (1983-10-01), Moriyama et al.
patent: 4425508 (1984-01-01), Lewis, Jr. et al.
patent: 4443743 (1984-04-01), Forys et al.
patent: 4485339 (1984-11-01), Trost
patent: 4492356 (1985-01-01), Taniguchi et al.
patent: 4504144 (1985-03-01), Trost
patent: 4506204 (1985-03-01), Galburt
patent: 4506205 (1985-03-01), Trost et al.
patent: 4507597 (1985-03-01), Trost
patent: 4514858 (1985-04-01), Novak
patent: 4516253 (1985-05-01), Novak
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4575942 (1986-03-01), Moriyama
patent: 4615515 (1986-10-01), Suzuta et al.
patent: 4628238 (1986-12-01), Smulders et al.
patent: 4630942 (1986-12-01), Tsumaki et al.
patent: 4641071 (1987-02-01), Tazawa et al.
patent: 4648723 (1987-03-01), Sugiyama et al.
patent: 4648724 (1987-03-01), Sugiyama et al.
patent: 4653408 (1987-03-01), Nagashima et al.
patent: 4654571 (1987-03-01), Hinds
patent: 4667139 (1987-05-01), Hirai et al.
patent: 4675891 (1987-06-01), Plessis et al.
patent: 4676492 (1987-06-01), Shamir
patent: 4677651 (1987-06-01), Hartl et al.
patent: 4684315 (1987-08-01), Sugishima et al.
patent: 4687980 (1987-08-01), Phillips et al.
patent: 4698575 (1987-10-01), Bouwer
patent: 4708465 (1987-11-01), Isohata et al.
patent: 4723086 (1988-02-01), Leibovich et al.
patent: 4742286 (1988-05-01), Phillips
patent: 4744675 (1988-05-01), Sakino et al.
patent: 4750721 (1988-06-01), Sasada
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4803712 (1989-02-01), Kembo et al.
patent: 4812725 (1989-03-01), Chitayat
patent: 4817930 (1989-04-01), Van Deuren
patent: 4870668 (1989-09-01), Frankel et al.
patent: 4879482 (1989-11-01), Murofushi
patent: 4887804 (1989-12-01), Ohtsuka
patent: 4916340 (1990-04-01), Negishi
patent: 4952858 (1990-08-01), Galburt
patent: 4993696 (1991-02-01), Furukawa et al.
patent: 5022619 (1991-06-01), Mamada
patent: 5031547 (1991-07-01), Hirose
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5059090 (1991-10-01), Bobroff et al.
patent: 5120034 (1992-06-01), Van Engelen et al.
patent: 5150153 (1992-09-01), Franken et al.
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5208497 (1993-05-01), Ishii et al.
patent: 5228358 (1993-07-01), Sakino et al.
patent: 5229670 (1993-07-01), Kagawa
patent: 5241183 (1993-08-01), Kanai et al.
patent: 5243491 (1993-09-01), Van Eijk et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5280677 (1994-01-01), Kubo et al.
patent: 5285142 (1994-02-01), Galburt et al.
patent: 5315526 (1994-05-01), Maeda et al.
patent: 5327060 (1994-07-01), Van Engelen et al.
patent: 5338121 (1994-08-01), Kobayashi et al.
patent: 5473410 (1995-12-01), Nishi
patent: 5477304 (1995-12-01), Nishi
patent: 5504407 (1996-04-01), Wakui et al.
patent: 5528118 (1996-06-01), Lee
patent: 5715064 (1998-02-01), Lin
patent: 5721608 (1998-02-01), Taniguchi
patent: 5744924 (1998-04-01), Lee
patent: 5760564 (1998-06-01), Novak
patent: 5796469 (1998-08-01), Ebinuma
patent: 5801833 (1998-09-01), Kobayashi et al.
patent: 6246204 (2001-06-01), Ebihara et al.
patent: 6252370 (2001-06-01), Ebihara et al.
patent: 6255795 (2001-07-01), Ebihara et al.
patent: 6255796 (2001-07-01), Ebihara et al.
patent: 6472840 (2002-10-01), Takahashi
patent: 6538720 (2003-03-01), Galburt et al.
patent: 6784978 (2004-08-01), Galburt
patent: 6885435 (2005-04-01), Galburt
patent: A1-0 502 578 (1992-11-01), None
patent: 2 288 277 (1995-10-01), None
patent: 61-45988 (1986-03-01), None
patent: 63-20014 (1988-01-01), None
patent: 3-21894 (1991-01-01), None
Buckley, Jere D., et al. “Step and Scan: A Systems Overview of a New Lithography Tool”. The Perkin-Elmer Corporation, Connecticut Operations Sector, Norwalk, CT, SPIE, vol. 1088,Laser Microlithopgraphy II(1989), pp. 424-433.
Moriyama, et al., “Precision X-Y Stage with a Piezo-driven Fine-table,” The Bulletin of The Japan Society Precision Engineering, vol. 22, No. 1, pp. 13-17, Mar. 1988.
SPIE, vol. 135, Developments in Semiconductor Microlithography III (1978), “A New VLSI Printer”, Thomas W. Novak, pp. 36-43.
Cobilt Model CA-3400 Automatic Projection Mask Aligner User's Manual (1980).
Micrascan II Descriptions (1993).
SEMATECH Presentation (Jul. 1993).
Ebihara Akimitsu
Novak Thomas
Nikon Corporation
Oliff & Berridg,e PLC
Ro Bentsu
LandOfFree
Electromagnetic alignment and scanning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electromagnetic alignment and scanning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electromagnetic alignment and scanning apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3589902