Electrical generator or motor structure – Dynamoelectric – Linear
Reexamination Certificate
2005-01-25
2005-01-25
Waks, Joseph (Department: 2834)
Electrical generator or motor structure
Dynamoelectric
Linear
C310S016000, C310S052000, C310S058000, C310S064000
Reexamination Certificate
active
06847132
ABSTRACT:
An electromagnetic actuator has a permanent magnet and an armature coil that performs relative movement with respect to the permanent magnet. A material having heat conduction anisotropy surrounds a surface of the armature coil and a heat radiating member radiates heat generated by the armature coil. The heat conduction anisotropic material is oriented to guide the heat generated from the armature coil to the heat radiating member. The actuator may be used in one or more groups of semiconductor substrate exposure apparatuses in a manufacturing factory that performs plural processes using the group of manufacturing apparatuses.
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Canon Kabushiki Kaisha
Cuevas Pedro J.
Fitzpatrick ,Cella, Harper & Scinto
Waks Joseph
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