Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Using radiant energy
Patent
1997-12-22
1999-10-12
Ballato, Josie
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
Using radiant energy
324 96, G01R 1338, G01R 1340
Patent
active
059660090
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to an electromagnetic actuator in which miniaturization has been realized through the use of semiconductor manufacturing technology, and to a manufacturing method therefor. In particular the invention relates to improvements in electromagnetic actuators for preventing disconnection of a drive coil for driving a movable plate.
BACKGROUND ART
Heretofore as a very small size electromagnetic actuator which utilizes semiconductor technology, there is for example, as proposed by the present inventor, the planar type mirror galvanometer (Japanese Patent Application Nos. 5-320524 and 6-9824), the planar type electromagnetic relay (Japanese Patent Application No. 5-320525), or the optical detecting instrument (Japanese Patent Application No. 6-310657).
A description of such conventional electromagnetic actuators is given below using as an example, a planar type mirror galvanometer.
Mirror galvanometers are used for example in laser scanners which deflection scan a laser beam, operating on the theory that when an electrical current is passed through a movable coil arranged in a magnetic field, an electromagnetic force is generated due to the interaction between the electrical current and the magnetic field, producing a rotational force (torque) proportional to the electrical current. The construction involves a device utilizing galvanometer theory where a movable coil rotates to an angle where the torque and a spring force are in equilibrium, the presence and size of a current being detected by an indicator needle swung by the movable coil. However instead of the indicator needle which rotates integrally with the movable coil, a reflecting mirror is provided.
Conventional practical mirror galvanometers use for example a movable piece of iron arranged in a magnetic field instead of the movable coil, with a magnetic path formed around the periphery of the movable piece of iron by means of a magnetic body including two permanent magnets and four magnetic poles. The magnetic flux between the poles is altered by changing the size and direction of a current flowing in a drive coil wound around the magnetic body, so that a reflecting mirror is swung by the movable piece of iron, to thus deflection scan a laser beam (see for example "Practical Laser Technology", Kyoritsu Publishing Company, Dec. 10, 1987, p210-212).
With the conventional mirror galvanometer however, miniaturization is difficult due for example to the drive coil being mechanically wound. There is thus the problem that miniaturization of laser scanning systems using such mirror galvanometers, and miniaturization of laser application equipment using such systems becomes difficult.
In order to solve this problem, the present inventors proposed the beforementioned very small thin type planar mirror galvanometer.
This planar type mirror galvanometer is discussed below.
With this planar type mirror galvanometer; a silicon substrate has integrally formed therewith, a planar movable plate, and a torsion bar at a central position of the movable plate for axially supporting the movable plate so as to be swingable in a perpendicular direction relative to the silicon substrate. A planar coil for producing a magnetic field by means of an electric current, is provided on an upper face peripheral edge portion of the movable plate, and a fully reflecting mirror is provided on an upper face central portion which is surrounded by the planar coil of the movable plate. A pair of electrode terminals for electrically connecting to the planar coil via a torsion bar portion, are provided on the silicon substrate side which supports the movable plate. Moreover, permanent magnets forming pairs with each other, are secured at the periphery of the movable plate so that a static magnetic field generated thereby acts on the planar coil portions located on the opposite ends of the movable plate which is parallel with the axial direction of the torsion bars. With the abovementioned patent applications, the pairs of permanent magnets are res
REFERENCES:
patent: 4421381 (1983-12-01), Ueda
patent: 4937226 (1990-06-01), Nishiguchi
patent: 5116457 (1992-05-01), Jerman
patent: 5767666 (1998-06-01), Asada
Toshimitsu Hirai, "Practical Laser Technics", Kyoritsu Publishing Company, pp. 210-212, Dec. 10, 1987.
Ballato Josie
Solis Jose M.
The Nippon Signal Co. Ltd.
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