Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-09-05
2006-09-05
Phasge, Arun S. (Department: 1753)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S22400M, C204S227000, C204S275100
Reexamination Certificate
active
07101465
ABSTRACT:
There is provided an electrolytic processing device including: a processing electrode to be brought into contact with or close to a workpiece; a feeding electrode for supplying electricity to the workpiece; an ion exchanger disposed in at least one of spaces between the workpiece and the processing electrode, and between the workpiece and the feeding electrode; a power source for applying a voltage between the processing electrode and the feeding electrode; and a liquid supply section for supplying a liquid to the space between the workpiece and at least one of the processing electrode and the feeding electrode, in which the ion exchanger is present. A substrate processing apparatus having the electrolytic processing device is also provided.
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patent: 6121152 (2000-09-01), Adams et al.
patent: 6368493 (2002-04-01), Mori et al.
patent: 6602396 (2003-08-01), Mori et al.
patent: 6743349 (2004-06-01), Mori et al.
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Kobata Itsuki
Kumekawa Masayuki
Makita Yuji
Saito Takayuki
Shirakashi Mitsuhiko
Ebara Corporation
Phasge Arun S,.
Wenderoth , Lind & Ponack, L.L.P.
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