Electrolytic processing apparatus and method

Details Electrolytic processing apparatus and method Electrolytic processing apparatus and method

2003-12-01

2008-10-28

Wilkins, III, Harry D (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S225000

Reexamination Certificate

active

07442282

ABSTRACT:
An electrolytic processing apparatus according to an embodiment of the present invention includes: a substrate holder for holding a substrate; a first electrode to make contact with the substrate for passing electricity to a processing surface of the substrate; an electrode head including a high resistance structure and a second electrode, disposed opposite to and in this order from the substrate holder, and a polishing surface facing the processing surface of the substrate held by the substrate holder; an electrolytic solution injection portion for injecting an electrolytic solution between the processing surface of the substrate held by the substrate holder and the second electrode; a relative movement mechanism for moving the substrate holder and the electrode head relative to each other; a press mechanism for pressing the polishing surface of the electrode head against the substrate held by the substrate holder; and a power source for applying a voltage between the first electrode and the second electrode. The power source is capable of selectively switching the direction of electric current.

REFERENCES:
patent: 6176992 (2001-01-01), Talieh
patent: 6375823 (2002-04-01), Matsuda et al.
patent: 2001/0024691 (2001-09-01), Kimura et al.
patent: 2002/0130049 (2002-09-01), Chen et al.

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