Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Gap maintenance or defined tool-workpiece gap
Reexamination Certificate
2003-09-25
2009-12-29
Phasge, Arun S (Department: 1795)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Gap maintenance or defined tool-workpiece gap
C205S654000, C204S198000, C204S22400M, C204S227000, C204S275100
Reexamination Certificate
active
07638030
ABSTRACT:
An electrolytic processing apparatus which, while eliminating a CMP processing entirely or reducing a load on a CMP processing to the least possible extent, can process and flatten a conductive material formed in the surface of a substrate, or can remove (clean) extraneous matter adhering to the surface of a workpiece such as a substrate. The present invention includes an electrode section including a plurality of electrode members disposed in parallel, each electrode member including an electrode and an ion exchanger covering the surface of the electrode, a holder for holding a workpiece, which is capable of bringing the workpiece close to or into contact with the ion exchanger of the electrode member, and a power source to be connected to the electrode of each electrode member of the electrode section. The ion exchanger of the electrode member includes an ion exchanger having an excellent surface smoothness and an ion exchanger having a large ion exchange capacity.
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Fukaya Koichi
Iizumi Takeshi
Kobata Itsuki
Kumekawa Masayuki
Makita Yuji
Ebara Corporation
Phasge Arun S
Wenderoth , Lind & Ponack, L.L.P.
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