Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Gap maintenance or defined tool-workpiece gap
Reexamination Certificate
2005-04-05
2005-04-05
Ryan, Patrick (Department: 1745)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Gap maintenance or defined tool-workpiece gap
C204S239000, C204S262000, C204S263000, C204S22400M
Reexamination Certificate
active
06875335
ABSTRACT:
An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultrapure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultrapure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultrapure water, with no impurities left behind on the processed surface of the workpiece.
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Fukunaga Akira
Kobata Itsuki
Mori Yuzo
Saito Takayuki
Shirakashi Mitsuhiko
Ebara Corporation
Mori Yuzo
Parsons Thomas H.
Ryan Patrick
Wenderoth , Lind & Ponack, L.L.P.
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