Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1976-10-01
1978-03-14
Mack, John H.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
2041298, 204146, C25F 312, C25F 500
Patent
active
040789802
ABSTRACT:
A layer of chromium is removed from the metalization system on a silicon integrated circuit wafer that also includes copper and aluminum. By electrolytic etching in a sulfuric acid solution containing about 10% by volume water saturated with chromium sulfate, chromium can be removed without excessive removal of copper or aluminum.
REFERENCES:
patent: 2409097 (1946-10-01), Batcheller
patent: 2751342 (1956-06-01), Guggenberger
patent: 2840521 (1958-06-01), Wasserman
patent: 3260659 (1966-07-01), Willing et al.
patent: 3314869 (1967-04-01), Dobbin et al.
Gouin William M.
Gray Bruce
Harris James M.
Higgins Willis E.
Mack John H.
National Semiconductor Corporation
Valentine D. R.
Woodward Gail W.
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