Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Reexamination Certificate
2011-03-01
2011-03-01
Bareford, Katherine A (Department: 1715)
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
C427S098600, C427S099100, C427S099500, C427S265000, C427S304000, C427S305000, C427S437000, C427S438000, C427S443100, C438S678000, C438S653000, C438S656000, C438S685000, C438S687000
Reexamination Certificate
active
07897198
ABSTRACT:
Electroless plating is performed to deposit conductive materials on work pieces such as partially fabricated integrated circuits. Components of an electroless plating bath are separately applied to a work piece by spin coating to produce a very thin conductive layer (in the range of a few hundred angstroms). The components are typically a reducing agent and a metal source.
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Cleary Timothy Patrick
Park Heung L.
Reid Jonathan D.
Webb Eric G.
Bareford Katherine A
Novellus Systems Inc.
Weaver Austin Villeneuve & Sampson LLP
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