Coherent light generators – Particular pumping means – Electrical
Reexamination Certificate
2003-09-26
2008-03-04
Rodriguez, Armando (Department: 2828)
Coherent light generators
Particular pumping means
Electrical
C372S055000, C372S057000
Reexamination Certificate
active
07339973
ABSTRACT:
Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.
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Carmichael James A.
Dyer Timothy S.
Moosman Bryan
Morton Richard G.
Zhang Jiping
Cray William
Cymer Inc.
Nguyen Phillip
Rodriguez Armando
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