Electrode structure for a zinc oxide thin film transducer

Details Electrode structure for a zinc oxide thin film transducer Electrode structure for a zinc oxide thin film transducer

1983-06-29

1984-04-24

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310321, H01L 4108

Patent

active

044450664

ABSTRACT:
An Al electrode structure for a zinc oxide thin film in which an intermediate layer of V.sub.2 O.sub.3, Ta, V, Cu, Ni or Ti is provided between the surface of the zinc oxide thin film and the Al electrode. A tuning fork vibrator equipped with such an electrode structure has high reliability in that changes in resonance frequency and series resonance resistance (Ro) with time are small.

REFERENCES:
patent: 3486046 (1969-12-01), Zalar

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