Electrode structure for a corner turn in a series-parallel-serie

Details Electrode structure for a corner turn in a series-parallel-serie Electrode structure for a corner turn in a series-parallel-serie

1988-06-30

1989-08-29

Munson, Gene M.

Electrical pulse counters, pulse dividers, or shift registers: c

Counting or dividing in incremental steps

Beam type tube

377 61, H01L 2978, G11C 1928

Patent

active

048622354

ABSTRACT:
A CCD is fabricated from an intermediate product comprising a body of semiconductor material having a channel region of a first conductivity type bounded by a substrate region of a second, opposite conductivity type and a surface of the body, and first and second gates overlying the surface and spaced from each other. The method comprises introducing a dopant into the channel region by way of the surface of the body. The first and second gates are opaque with respect to the dopant. The dopant is such that it forms a zone within the channel region, beneath the space between the first and second gates, and the zone is of the first conductivity type and is of a higher doping concentration than other portions of the channel region. A third gate is formed over the surface of the body of semiconductor material, the third gate being at least partially disposed across the space between the first and second gates.

REFERENCES:
patent: 3852799 (1974-12-01), Walden
patent: 4012759 (1977-03-01), Esser
patent: 4103347 (1978-07-01), Barton
patent: 4241422 (1980-12-01), Gruter
patent: 4777519 (1988-10-01), Oshima

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