Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1994-03-28
1995-08-29
Walberg, Teresa J.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
361278, 7351432, 29 2541, 4271262, 1562731, H01G 700
Patent
active
054466164
ABSTRACT:
A sensing electrode on a glass layer of an anodically-bonded capacitive sensor has an interfacial barrier film containing a nitride compound between the electrode and the glass layer. In one embodiment, the capacitive sensor is an inertial sensor having a sensing element hingedly mounted to a frame which is anodically bonded to the glass layer. The sensing electrode is then located on a surface of the glass layer facing the sensing element. The sensing element and the frame are preferably made of silicon and the interfacial film is preferably silicon nitride.
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Litton Systems Inc.
Mills Gregory C.
Walberg Teresa J.
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