Electrode semiconductor workpiece holder

Details Electrode semiconductor workpiece holder Electrode semiconductor workpiece holder

1999-04-27

2001-08-14

Gorgos, Kathryn (Department: 7741)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C118S729000, C118S503000, C204S297010, C204S297090, C204S297100, C204S297140

Reexamination Certificate

active

06274013

ABSTRACT:

TECHNICAL FIELD
This invention relates to semiconductor workpiece holders and methods for use in processing semiconductor workpieces.
BACKGROUND OF THE INVENTION
Semiconductor workpieces, such as semiconductor wafers and the like, are the subject of extensive processing which most often involves some type of automated or computer controlled processing. In processing semiconductor workpieces it is often desirable to minimize the amount of human contact to which a particular workpiece is exposed. Such reduces the chances of an inadvertent contamination which could render the workpiece useless.
Often times during processing, it is necessary to treat a particular workpiece or workpiece surface with chemicals, either gaseous or liquid. Such treatment allows for films or layers of material to be deposited or grown on a workpiece surface. One method of accomplishing this is to expose the particular workpiece to desired processing environments in which desired chemicals are present to form or grow such films or layers. Some processing regimes involve moving the workpiece within the processing environment to effectuate film or layer coverage. Other processing regimes involve forming layers on or over a workpiece utilizing various electroplating techniques.
The above-described processing scenarios pose, among other challenges, a two-fold challenge. First, a challenge exists to reduce the amount of human contact with a semiconductor workpiece which is undergoing processing. Second, during such processing, challenges exist relating to the treatment of semiconductor workpieces during the various processing stages. For example, in the above described processing context in which a workpiece is exposed to and moved within a processing environment, challenges exist which relate to transferring the workpiece into the environment, effectively holding or maintaining the workpiece within the environment during processing, and moving the workpiece out of the environment at the conclusion of a particular processing stage. With respect to the semiconductor processing steps which utilize electroplating techniques, challenges exist which relate to effectively holding or maintaining the workpiece in a processing environment while a desired electrical bias is imparted to the workpiece.
The prior electroplating semiconductor processing equipment has also suffered some difficulty in that providing electrical contact between the electrodes and wafers has frequently led to the buildup of plating material deposits at the point of contact. This deposits can be problematic in subsequent processing steps and lead to defects in the resulting integrated circuits or other devices being made. Thus improved electrode constructions are needed to address this deficiency.
This invention grew out of the need to provide improved semiconductor processing devices and methods which effectively and efficiently hold or maintain workpieces within particular processing environments, including processing environments in which electroplating of workpieces takes place.


REFERENCES:
patent: 3948502 (1976-04-01), Waller et al.
patent: 4192729 (1980-03-01), Cancelleri
patent: 5013015 (1991-05-01), Fatheree
patent: 5078852 (1992-01-01), Yee et al.
The American Heritage Dictionary of the English Language, William Morris, editor, Houghton Mifflin Co., Boston, pp 824, 1976 Month of publication not available.

Affiliated with

Also associated with

Rating

Electrode semiconductor workpiece holder does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrode semiconductor workpiece holder, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrode semiconductor workpiece holder will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2462474