Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1992-09-18
1994-06-28
Weisstuch, Aaron
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
20429831, 156345, H05H 146
Patent
active
053244117
ABSTRACT:
A disc-shaped electrode plate body is made of high-purity glassy carbon and has a large number of very-small-diameter through holes each of which has a plurality of spherical recesses in its internal wall surface.
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Ichishima Masahiko
Kasahara Masatoshi
Makita Ritsurou
Sasaki Yasumi
Toya Eiichi
Toshiba Ceramics Co. Ltd.
Weisstuch Aaron
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