Electrode plate for generating plasma

Details Electrode plate for generating plasma Electrode plate for generating plasma

1985-10-04

1987-09-01

DeMeo, Palmer C.

Electric lamp and discharge devices

With temperature modifier

Hollow electrode or lead

219121PN, 68 5E, H01J 724, B23K 900, B08B 312

Patent

active

046911375

ABSTRACT:
An electrode plate for generating low temperature plasma comprising a plurality of long electrode plate members with the same form, a plurality of cooling water passages, which serve simultaneously as support members, for connecting each pair of the adjacent electrode plate members respectively along their longitudinal direction with a cooling water passage therebetween so as to arrange the adjacent electrode plate members alternately up and down in parallel with no formation of a projection, and cooling water communicating pipes provided outside the electrode plate members.
By arranging a pair of the present inventive electrode plates up and down in parallel and supplying high frequency electric current thereto, low temperature plasma can be generated uniformly and effectively all over the electrode plates.

REFERENCES:
patent: 3586905 (1971-06-01), Bignell
patent: 4507539 (1985-03-01), Sando et al.

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