Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2002-08-23
2004-10-26
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S891000, C430S007000, C430S271100, C349S106000, C349S113000, C156S234000
Reexamination Certificate
active
06809850
ABSTRACT:
TECHNICAL FIELD
The present invention relates to an electrode plate for a color display excellent in chemical resistance and in adhesive properties, a method for manufacturing the same, and a color display that uses the electrode plate.
BACKGROUND ART
An electrode plate used for a color display is generally manufactured such that a color filter made from organic resin is formed on a glass substrate, an organic protective film similarly made from organic resin is then applied thereonto, and an inorganic transparent electrode having electric conductivity is formed. The conductive line of the transparent electrode is generally installed such that a uniformly transparent conductive film is first formed, and then wet etching is performed to obtain a desired conductive line shape.
When the wet etching is performed for conductive line processing, various chemicals are used, and therefore there occurs a situation in which the color filter or the transparent organic protective film, which is laid underneath the transparent conductive film, is corroded and invaded by the chemicals. In addition, since the inorganic conductive film is formed on the organic resin film, it is very difficult to give sufficient adhesive properties to be able to endure predetermined processing.
Therefore, conventionally, chemical resistance and adhesive properties have been improved by forming other thin films (silicon dioxide thin films are generally used) between the color filter or the organic protective film and the inorganic conductive film. However, an RF sputtering technique according to which the silicon dioxide thin films are formed has an industrial disadvantage in the fact that film formation speed is slow. Additionally, the RF-plasma prior to forming the silicon dioxide thin film causes the color filter or the organic protective film to receive physical/chemical damage, thus mainly causing instability occurring when electrode plates are manufactured at a post-step (i.e., step of forming the inorganic conductive film after forming the color filter and the organic protective film on the glass substrate).
Further, in order to solve the aforementioned problems, the present inventors have previously invented an electrode plate, etc., capable of preventing physical/chemical damage of a color filter or an organic protective film and capable of improving adhesive properties with an inorganic conductive film by colliding a gas ion that includes an oxygen ion or an argon ion with the color filter or the organic protective film so as to form a layer, in which the color filter or the organic protective film is at least partially carbonized, between the color filter or the organic protective film and the transparent conductive film (Japanese Unexamined Patent Publication No. H 10-10518). Further, in the invention described in this publication, the present inventors have disclosed an Embodiment in which ions are emitted with an ion gun in a vacuum atmosphere as a method for colliding the gas ion that includes the oxygen ion or the argon ion with the color filter or the organic protective film.
According to the invention described in Japanese Unexamined Patent Publication No. H10-10518 that has been made by the present inventors, a layer that has been at least partially carbonized is formed on a color filter or on an organic protective film, and thereby the chemical resistance and adhesive properties of the color filter or the organic protective film can be enormously improved without forming a transparent inorganic thin film, such as a silicon dioxide thin film, which has been conventionally required, on these films, and a transparent electrode film (inorganic conductive film) with a desired pattern has come to be easily processed.
However, since the method performed by the present inventors includes a step of processing under a vacuum atmosphere, it is difficult to process a large amount of electrode plate materials under the vacuum, and, disadvantageously, this leads to a decrease in productivity. Additionally, since the method includes processing under the vacuum, an expensive apparatus is required to manufacture the electrode plate. Therefore, disadvantageously, this raises the manufacturing costs of products to be obtained.
DISCLOSURE OF THE INVENTION
It is therefore an object of the present invention to obtain a manufacturing method for an electrode plate for a color display according to which a color filter or an organic protective film is more easily prevented from receiving physical/chemical damage and according to which adhesive properties with a conductive film are improved. Another object of the present invention is to, in the manufacturing method for the electrode plate, protect a color filter or an organic protective film in an easier way when a transparent conductive film is formed by wet etching. Still another object of the present invention is to obtain an electrode plate for a color display that does not use a transparent inorganic thin film like a silicon dioxide thin film, which has generally conventionally been used, between a color filter or an organic protective film and an inorganic conductive thin film, and is to obtain a color display using the electrode plate.
The aforementioned problems of the present invention are solved by the following manufacturing methods (1) and (2), by an electrode plate for a color display obtained by these manufacturing methods, and by a color display that uses the electrode plate.
(1) A method for manufacturing an electrode plate for a color display by sequentially forming a color filter and a transparent conductive film on a substrate, comprising the steps of: forming a color filter on a substrate; thereafter forming a layer in which said color filter is at least partially carbonized through processing that uses a discharge under a dry atmosphere having substantially atmospheric pressure; and
forming a transparent conductive film on the partially carbonized color filter layer.
(2) A method for manufacturing an electrode plate for a color display by sequentially forming a color filter, an organic protective film for protecting the color filter, and a transparent conductive film on a substrate, comprising of: sequentially forming a color filter and an organic protective film on a substrate; thereafter forming an at least partially carbonized layer on said organic protective film through processing that uses a discharge under a dry atmosphere having substantially atmospheric pressure; and forming a transparent conductive film on the partially carbonized organic protective film.
According to the invention of the method (1), by performing processing that uses a discharge under a dry atmosphere having substantially atmospheric pressure, a partially carbonized color filter layer can be formed on a color filter without the necessity of expensive vacuum processing equipment, and, as a result, the color filter is prevented from receiving physical/chemical damage, and adhesive properties with the transparent conductive film (inorganic conductive film) formed thereon can be improved.
Similarly, according to the invention of the method (2), by performing the processing that uses a discharge under a dry atmosphere having substantially atmospheric pressure, a partially carbonized organic protective film layer can be formed on an organic protective film without the necessity of expensive vacuum processing equipment, and, as a result, the organic protective film is prevented from receiving physical/chemical damage, and adhesive properties with the transparent conductive film (inorganic conductive film) formed thereon can be improved.
If carbonization that uses a discharge is applied onto a color filter or onto an organic protective film under an ordinary atmospheric pressure, the color filter or the organic protective film will receive chemical damage, and, as a result, an electrode plate for a color display that is inferior in alkali resistance will be produced. However, the present inventors pre-dry the atmosphere, and perform processing that uses a corona discharge or p
Ben Loha
Conlin David G.
Edwards & Angell LLP
Nippon Sheet Glass Co. Ltd.
Roos Richard J.
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