Electrode plate and process for production thereof

Details Electrode plate and process for production thereof Electrode plate and process for production thereof

1992-06-09

1994-11-01

Sikes, William L.

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

1566591, 428 1, 428650, 428655, G02F 11343

Patent

active

053611535

ABSTRACT:
An electrode plate suitable for use in an electro-optical device, such as a liquid crystal device, is formed by successively disposing on a substrate a first layer of a transparent conductor film, a second layer of molybdenum or a molybdenum alloy, a third layer of aluminum or an aluminum alloy, and a fourth layer of molybdenum or a molybdenum alloy. The laminate electrode structure is patterned by a photolithographic process, followed by removal of the photoresist with a peeling liquid, during which the fourth molybdenum layer functions as a protective film for the third al layer against the peeling liquid to prevent the formation of electrode defects.

REFERENCES:
patent: 4543573 (1985-09-01), Fuyama et al.
patent: 4853296 (1989-08-01), Fukuyoshi
patent: 4859036 (1989-08-01), Yamanaka et al.
patent: 5150233 (1992-09-01), Enomoto et al.

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