Electrode manufacturing method

Details Electrode manufacturing method Electrode manufacturing method

2006-02-21

2006-02-21

Zarneke, David (Department: 2891)

Semiconductor device manufacturing: process

Electron emitter manufacture

C438S478000, C438S500000, C438S502000, C438S503000, C438S507000, C438S509000, C428S328000, C428S331000, C106S286100, C106S286200, C106S286400

Reexamination Certificate

active

07001787

ABSTRACT:
An electrode manufacturing method comprises: forming plural protruding portions on a surface of a substrate; introducing first particles having a size that changes according to heat, light, or a first solvent between said plural protruding portions; changing the size of the first particles by applying heat, light, or the first solvent to said first particles; and depositing an electrode material onto the surface of said substrate.

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