Electrode in a discharge produced plasma extreme ultraviolet...

Details Electrode in a discharge produced plasma extreme ultraviolet... Electrode in a discharge produced plasma extreme ultraviolet...

2006-05-23

2006-05-23

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100

Reexamination Certificate

active

07049614

ABSTRACT:
An electrode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.

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