Electrode forming method

Etching a substrate: processes – Forming or treating electrical conductor article

Reexamination Certificate

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C216S054000, C257SE21172

Reexamination Certificate

active

10934379

ABSTRACT:
An electrode forming method with an excellent yield, includes: (a) forming an adhesion preventing member having a predetermined pattern on a base member: (b) forming a conductive layer on the base member and the adhesion preventing member; and (c) forming an electrode having a predetermined pattern by removing the conductive layer on the adhesion preventing member in a state in which the adhesion preventing member is disposed on the base member. Adhesion between the adhesion preventing member and the conductive layer is smaller than adhesion between the base member and the conductive layer.

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