Electrode for vapor deposition and vapor-deposition method using

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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Details

427180, 427204, 427295, 427379, 4273977, B05D 306

Patent

active

049785567

ABSTRACT:
Thermal breakage of crystalline electrodes used in arc-vapor deposition is prevented by originally fabricating the electrodes from broken pieces of the crystalline material which are slightly sintered together and form an electrode body in which a carbon rod or other conductor is embedded to provide electrical contact. The particles are sintered in a vacuum oven and a pool of the electrode material can be formed at a working end of the electrode body when the latter is used for arc-vapor deposition.

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