Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1985-07-29
1986-09-16
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
156643, 156646, 156656, 204298, C23F 102, B44C 122, C03C 1500
Patent
active
046120777
ABSTRACT:
An electrode includes a plurality of nested concentric rings forming plenum chambers. Process gas is fed into the plenum chambers through capillary tubes. The gas is then delivered through slits between the rings into a plasma etching reactor.
REFERENCES:
patent: 4277304 (1981-07-01), Horiike et al.
patent: 4340462 (1982-07-01), Koch
patent: 4534816 (1985-08-01), Chen et al.
Smith Donald L.
Tracy David H.
Grimes Edwin T.
Masselle Francis L.
Murphy Thomas P.
Powell William A.
The Perkin-Elmer Corporation
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