Electrode for measuring thickness of dielectric layers on conduc

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Erosion

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204 1T, 204195R, 324 54, G01N 2702, G01N 2726

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active

039756815

ABSTRACT:
An electrode structure comprising a tube of substantially electrically insulating material such as glass, having a rounded tip of substantially electrically insulating material such as rubber, which tip has a capillary opening therethrough, encloses a metallic cathode and liquid electrolyte, and that electrode structure is placed with the tip and capillary opening in contact with the surface of a sample conductive substrate having an electrical barrier layer thereon whose thickness is to be measured, and electrical potential is applied between the cathode and sample conductive substrate, which is the anode in the system, and the thickness of the electrical barrier layer is measured as a function of the highest applied voltage that does not produce a pronounced increase in current flow in the system.

REFERENCES:
patent: 2345498 (1944-03-01), Perley
patent: 2497052 (1950-02-01), Williams
patent: 2894882 (1959-07-01), Strodtz
patent: 3293155 (1966-12-01), Stone
patent: 3315270 (1967-04-01), Hersch
patent: 3445366 (1969-05-01), Vermeer

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