Electrode for generating plasma and plasma processing...

Details Electrode for generating plasma and plasma processing... Electrode for generating plasma and plasma processing...

2006-11-30

2009-11-17

Paschall, Mark H (Department: 3742)

Electric heating

Metal heating

By arc

C219S121430, C156S345470, C118S7230AN, C216S071000

Reexamination Certificate

active

07619179

ABSTRACT:
In an electrode for generating a plasma, disposed to face a surface of a substrate to perform a plasma processing on the surface of the substrate, the electrode includes a metal-based composite material formed by impregnating a metal into a base member made of a porous ceramic, and having a joint surface at least facing toward the entire surface of the substrate. The electrode also includes a conductive plate made of a plasma-resistant material melt-bonded by a metal to the joint surface of the metal-based composite material.

REFERENCES:
patent: 4534816 (1985-08-01), Chen et al.
patent: 4612077 (1986-09-01), Tracy et al.
patent: 5074456 (1991-12-01), Degner et al.
patent: 2005/0211384 (2005-09-01), Hayashi
patent: 2001-217362 (2001-08-01), None
patent: 2005-228973 (2005-08-01), None

Affiliated with

Also associated with

Rating

Electrode for generating plasma and plasma processing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrode for generating plasma and plasma processing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrode for generating plasma and plasma processing... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4052503