Electrode configuration in a MEMS switch

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive

Reexamination Certificate

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C200S181000

Reexamination Certificate

active

06850133

ABSTRACT:
A microelectromechanical system (MEMS) switch that includes a signal contact, an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode. The signal contact includes a first portion and a second portion. The actuation electrode is positioned between the first and second portions of the signal contact.

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Muldavin, Jeremy.B. ,et al. ,“Inline Capacitive and DC-Contact MEMS Shunt Switches”,Submitted to the IEEE Microwave and Wireless Components Letters, (Feb. 15, 2001), 1-3.

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