Electrode configuration for piano MEMs micromirror

Details Electrode configuration for piano MEMs micromirror Electrode configuration for piano MEMs micromirror

2006-03-07

2006-03-07

Pak, Sung (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S016000, C359S224200, C359S225100

Reexamination Certificate

active

07010188

ABSTRACT:
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

REFERENCES:
patent: 6327855 (2001-12-01), Hill et al.
patent: 6442307 (2002-08-01), Carr et al.
patent: 6491404 (2002-12-01), Hill
patent: 6529652 (2003-03-01), Brener
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6535319 (2003-03-01), Buzzetta et al.
patent: 6538816 (2003-03-01), Fuchs et al.
patent: 6612029 (2003-09-01), Behin et al.
patent: 6681063 (2004-01-01), Kane et al.
patent: 6723659 (2004-04-01), Mizuno et al.
patent: 6778728 (2004-08-01), Taylor et al.
patent: 2002/0097952 (2002-07-01), Jin et al.
patent: 2002/0122217 (2002-09-01), Nakajima
patent: 2002/0126455 (2002-09-01), Wood
patent: 2003/0012486 (2003-01-01), Ducellier et al.
patent: 2003/0035192 (2003-02-01), Mizuno et al.
patent: 2003/0052569 (2003-03-01), Dhuler et al.
patent: WO01/61400 (2001-08-01), None
patent: WO01/73934 (2001-10-01), None
“Single-Chip 1×84 MEMS Mirror Array for Optical Telecommunication Applications” by Juneau et al, MOEMS and Miniaturized Systems III, James H. Smith, Editor. SPIE vol. 4983 (2003) pp. 53 to 64.

Affiliated with

Also associated with

Rating

Electrode configuration for piano MEMs micromirror does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrode configuration for piano MEMs micromirror, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrode configuration for piano MEMs micromirror will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3527325