Electrode assembly including iridium based mercury ultramicroele

Details Electrode assembly including iridium based mercury ultramicroele Electrode assembly including iridium based mercury ultramicroele

1993-01-11

1995-01-03

Niebling, John

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204412, 204290R, 204435, G01N 2726

Patent

active

053783433

ABSTRACT:
An electrode assembly for use in quantifying the levels of various metals in an aqueous solution. In one embodiment, the electrode assembly comprises a substrate, the substrate being a silicon chip upon which a layer of silicon dioxide has been grown. A plurality of gold bond pads and gold interconnect traces are deposited by microphotolithography onto the silicon dioxide layer. An array of iridium deposits are then patterned by microphotolithography onto the interconnect traces at predefined locations. A passivation layer is deposited by plasma enhanced chemical vapor deposition over the finished metallization to electrically insulate it from external solutions. Plasma etching is then used to expose at least a portion of each of the iridium deposits. Just prior to analytical use, one or more of the exposed iridium elements are electroplated with mercury. The present invention is also directed to a field deployable sensor including the above-described electrode assembly.

REFERENCES:
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Kounaves et al., J. Electroanal. Chem. vol. 301, pp. 77-85 (1991) no month presently available.
Kovacs, Technology Development for a Chronic Neural Interface, Ph.D. Dissertation, Stanford University, Technical Report No. E073-1, pp. 87-100 (Aug. 1990).
Kovacs, Proceedings of the 12th International Conference of the Assoc. for the Advanc. of Rehab. Techn., New Orleans, La., pp. 292-293 (Jun. 1989).

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