Radiant energy – With charged particle beam deflection or focussing – With target means
Patent
1981-05-27
1983-10-11
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
With target means
250396R, H01J 3726
Patent
active
044094876
ABSTRACT:
The invention relates to an electrode arrangement of an electrostatic deflection system for corpuscular beams comprising a plurality of electrodes adjacently arranged on opposing faces of said deflection system. At least one of two opposing electrodes on the opposing faces is provided with an individual potential supply. The portions of the faces between the electrodes in one line which are facing the corpuscular beam are electrically conductive. The inventive arrangement permits the control of one or a plurality of corpuscular beams simultaneously and/or individually, which considerably increases the output of an electron beam processing device.
REFERENCES:
patent: 3697793 (1972-10-01), King
patent: 4130761 (1978-12-01), Matsuda
patent: 4200794 (1980-04-01), Newberry
patent: 4224523 (1980-09-01), Crean
Kuschel Georg
Reinhardt Hartmut
LandOfFree
Electrode arrangement for electrostatic deflection system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electrode arrangement for electrostatic deflection system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrode arrangement for electrostatic deflection system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1277464