Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Treating substrate prior to coating
Reexamination Certificate
2006-02-03
2009-06-23
Bell, Bruce F (Department: 1795)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Treating substrate prior to coating
C205S205000, C205S210000, C205S640000, C205S662000, C205S668000, C205S670000, C204S212000, C204S198000, C204S199000, C204S221000, C204S22400M, C204S279000
Reexamination Certificate
active
07550070
ABSTRACT:
An electrode assembly includes a distribution plate having a plurality of grooves that communicate with openings in an overlying polishing pad layer. The grooves include end openings that allow for draining of process solution, both during processing and subsequent cleaning/rinsing of the pad. Drainage occurs continually during processing, cleaning and rinsing, and so is constricted through the end openings relative to the grooves, to prevent wastage. The end openings are sufficiently large, however, to substantially completely drain fluids from the grooves between steps without delaying robotic motions.
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Basol Bulent M.
Bogart Jeffrey
Bell Bruce F
Knobbe Martens Olson & Bear LLP
Novellus Systems Inc.
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