Electrode and interconnect materials for MEMS devices

Details Electrode and interconnect materials for MEMS devices Electrode and interconnect materials for MEMS devices

2008-05-06

2008-05-06

Schwartz, Jordan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

11416920

ABSTRACT:
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor can be tuned to have optical properties which allow it to be useful for optical MEMS devices.

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