Electroconductive thin film

Details Electroconductive thin film Electroconductive thin film

1986-08-05

1988-04-05

Ives, P. C.

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

428432, 428697, 428469, 427 40, 427 41, B32B 1500, B32B 900, B05D 306

Patent

active

047358521

ABSTRACT:
This invention relates to an electroconductive thin film prepared by forming a polymerized thin film on a substrate in a vacuum reactor by the decomposition of a metal complex starting material by glow discharge, said metal complex having a ligand selected from the group consisting of acetylacetonate and at least partially fluorinated acetylacetonate.

REFERENCES:
patent: 4402996 (1983-09-01), Gauger et al.
patent: 4532188 (1985-07-01), Naarman et al.

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