Electroconductive oxide sintered compact, sputtering target...

Compositions – Electrically conductive or emissive compositions – Metal compound containing

Reexamination Certificate

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Reexamination Certificate

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10522263

ABSTRACT:
A SrRuO3conductive oxide sintered body characterized in that the relative density is 93% or more. By improving the additive amount and sintering conditions of Bi2O3, the present invention seeks to improve the relative density of a SrRuO3conductive oxide sintered body, and to provide a conductive oxide sintered body capable of suppressing the generation of particles during sputtering upon forming a thin film and improving the quality and production yield; a sputtering target formed from such sintered body; and the manufacturing method thereof.

REFERENCES:
patent: 5624542 (1997-04-01), Shen et al.
patent: 5995359 (1999-11-01), Klee et al.
patent: 6132487 (2000-10-01), Mori
patent: 6284013 (2001-09-01), Shindo et al.
patent: 6528442 (2003-03-01), Kuwano et al.
patent: 6555864 (2003-04-01), Cross et al.
patent: 6843975 (2005-01-01), Suzuki
patent: 6-056503 (1994-03-01), None
patent: 10-330924 (1998-12-01), None
patent: 2000-001774 (2000-01-01), None
patent: 2000-128638 (2000-05-01), None
patent: 2000-247739 (2000-09-01), None
patent: 2002-193668 (2002-07-01), None
patent: 2002-211978 (2002-07-01), None
patent: WO 02/051769 (2002-07-01), None
Patent Abstracts of Japan, 1 page English Abstract of JP 2002-193668, Jul. 2002.
Patent Abstracts of Japan, 1 page English Abstract of JP 2000-247739, Sep. 2000.
esp@cenet database, 1 page English Abstract of JP 6-056503, Mar. 1994.
esp@cenet database, 1 page English Abstract of JP 2002-211978, Jul. 2002.
Patent Abstracts of Japan, 1 page English Abstract of JP 2000-128638, Jul. 2002.
Patent Abstracts of Japan, 1 page English Abstract of JP 2000-001774, Sep. 2000.
Patent Abstracts of Japan, 1 page English Abstract of JP 10-330924, Sep. 2000.

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