Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1991-11-27
1994-01-11
Valentine, Donald R.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
20412955, 20412965, C25F 312, C25F 314
Patent
active
052777693
ABSTRACT:
Porous semiconducting material, e.g. silicon, is formed by electrochemical treatment of a specimen in hydrofluoric acid, using the specimen as anode. Before the treatment, the specimen can be masked. The porous material is then etched with a caustic solution or is oxidized, depending of the kind of structure desired, e.g. a thinned specimen, a specimen, a patterned thinned specimen, a specimen with insulated electrical conduits, and so on. Thinned silicon specimen can be subjected to tests, such as measurement of interstitial oxygen by Fourier transform infra-red spectroscopy (FTIR).
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Chafin James H.
Elliott Russell D.
Moser William R.
The United States of America as represented by the Department of
Valentine Donald R.
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