Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Sharpening or point making
Patent
1997-05-01
1999-04-06
Gorgos, Kathryn
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Sharpening or point making
205674, 445 35, 445 50, C25F 314
Patent
active
058913211
ABSTRACT:
A method for sharpening field emitter tips by electroetching/polishing. In gated field emitters, it is very important to initiate electron emission at the lowest possible voltage and thus the composition of the emitter and the gate, as well as the emitter-gate structure, are important factors. This method of sharpening the emitter tips uses the grid as a counter electrode in electroetching of the emitters, which can produce extremely sharp emitter tips as well as remove asperities and other imperfections in the emitters, each in relation to the specific grid hole in which it resides. This has the effect of making emission more uniform among the emitters as well as lowering the turn-on voltage.
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patent: 5562516 (1996-10-01), Spindt et al.
Allan J. Melmed, "The art and science and other aspects of making sharp tips";American Vacuum Society; Journal of Vacuum Science Technology; B; vol. 9, No. 2; pp. 601-608, Apr. 1991.
Busta H. Heinz, "Vacuum Microelectronics--1992 Review"; Journal of Micromechanical Microeng; vol. 2; pp. 43-74, Jun. 1992.
J.K. Cochran et al, "Low-voltage field emission from tungsten fiber arrays in a stabilized zirconia matrix"; Journal of Material Research; vol. 2, No. 3; pp. 322-325, Mar. 1987.
Carnahan L. E.
Gorgos Kathryn
Smith-Hicks Erica
The Regents of the University of California
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