Electrochemical planarization of metal feature surfaces

Details Electrochemical planarization of metal feature surfaces Electrochemical planarization of metal feature surfaces

2005-02-01

2005-02-01

Wilson, Lee D. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C204S166000, C451S042000, C451S285000

Reexamination Certificate

active

06848975

ABSTRACT:
One aspect is directed to an improved method for polishing an integrated circuit. According to one aspect, metal features deposited on an integrated circuit are polished using electropolishing techniques. Because electropolishing is used, polishing avoids removal of softer insulating materials of the integrated circuit.

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