Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1992-01-09
1994-02-08
Valentine, Donald R.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
20412965, 2041297, 20412975, 204224M, 204225, 204284, 204240, B23H 310, B23H 906, B23H 732
Patent
active
052845540
ABSTRACT:
The present invention describes a high speed, high precision electrochemical micromachining tool, chemical solution and method for the one sided through-mask micropatterning of conducting foils and films supported by insulating material. The tool of the present invention can include either a movable plate means allowing for the movement of the workpiece to and fro above the cathode assembly, or a movable cathode assembly means allowing for the movement of said cathode assembly to and fro beneath the workpiece. Said cathode assembly also consists of a nozzle assembly from which the electrolytic solution emerges as electrolytic shower and impinges upon the workpiece. Methods to resolve the problems related to the loss of electrical contact during the electrochemical micromachining process are also described.
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Datta Madhav
Romankiw Lubomyr T.
International Business Machines - Corporation
Valentine Donald R.
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