Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1990-04-10
1991-05-14
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
2041293, C25F 300, B23H 300
Patent
active
050153463
ABSTRACT:
An electrochemical method for defect delineation in thin-film SOI or SOS wafers in which a surface of a silicon wafer is electrically connected so as to control the voltage of the surface within a specified range, the silicon wafer is then contacted with an electrolyte, and, after removing the electrolyte, defects and metal contamination in the silicon wafer are identified.
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Guilinger Terry R.
Jones Howland D. T.
Kelly Michael J.
Medernach John W.
Stevenson Joel O.
Chafin James H.
Mayekar K.
McMillan Armand
Moser William R.
Niebling John F.
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