Electrochemical method and system for monitoring hydrogen...

Details Electrochemical method and system for monitoring hydrogen... Electrochemical method and system for monitoring hydrogen...

2005-12-06

2005-12-06

Olsen, Kaj K. (Department: 1753)

Electrolysis: processes, compositions used therein, and methods

Electrolytic analysis or testing

For oxygen or oxygen containing compound

C205S786000, C204S400000, C204S412000

Reexamination Certificate

active

06972083

ABSTRACT:
Electrochemical monitoring system and method are provided for online determination of hydrogen peroxide concentration in slurries, e.g., a chemical mechanical polishing slurry. The monitoring system includes an electrochemical cell fluidly coupled to receive a slurry including hydrogen peroxide. The cell includes at least a working electrode made up of tungsten, a reference electrode and a counter electrode. The system further includes a potentiostat electrically coupled to the working electrode to supply a desired potentials in increments to the working electrode and measure current flow between the working electrode and the counter electrode. The amount of passive current established between the working electrode and the counter electrode over a selected time window is indicative of the concentration of hydrogen peroxide in the slurry.

REFERENCES:
patent: 4072594 (1978-02-01), Outsuka et al.
patent: 4384925 (1983-05-01), Stetter et al.
patent: 5637031 (1997-06-01), Chen
patent: 5686829 (1997-11-01), Girault
patent: 5846398 (1998-12-01), Carpio
patent: 5948236 (1999-09-01), Lipsztajn
Cosgrove et al, Analyst, 1989, vol. 114, pp. 1627-1632.
Skoog, Principles of Instrumental Analysis, 1985, pp. 627-630.
Bard and Faulkner, Electrochemical Methods, 2nd Edition, 2001, pp. 24-28.

Affiliated with

Also associated with

Rating

Electrochemical method and system for monitoring hydrogen... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrochemical method and system for monitoring hydrogen..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrochemical method and system for monitoring hydrogen... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3507290