Electrochemical mechanical processing with advancible sweeper

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Contacting coating as it forms with solid member or material...

Reexamination Certificate

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C204S206000, C204S207000, C204S209000, C204S22400M, C204S22400M, C205S137000, C205S148000, C205S662000, C205S668000, C205S671000, C205S686000

Reexamination Certificate

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07097755

ABSTRACT:
The present invention provides an apparatus for electrochemical mechanical processing of a surface of a workpiece by utilizing a process solution. The apparatus of the present invention includes an electrode touching the process solution, a belt workpiece surface influencing device extended between a supply spool and a receiving spool. During the process, the surface of the workpiece is placed in proximity of the workpiece surface influencing device and the process solution is flowed through the process section and onto the surface while a potential difference is applied between the electrode and the surface of the workpiece.

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patent: 4921583 (1990-05-01), Sewell et al.
patent: 5372699 (1994-12-01), Rischke et al.
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patent: 5968333 (1999-10-01), Nogami et al.
patent: 6176992 (2001-01-01), Talieh
patent: 6241583 (2001-06-01), White
patent: WO 02/29859 (2002-04-01), None
patent: WO 02/057514 (2002-07-01), None
patent: WO 03/028048 (2003-04-01), None

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