Electrochemical generation of silane

Details Electrochemical generation of silane Electrochemical generation of silane

1994-08-31

1996-04-23

Niebling, John

Electrolysis: processes, compositions used therein, and methods

Electrolytic synthesis

Preparing inorganic compound

427255, 427574, 427578, C25B 100, C23C 1600, H05H 102, H05H 124

Patent

active

055100074

ABSTRACT:
The present invention provides improved processes and apparatus for fabrication of articles having silicon-containing regions. The process comprises generating silane by electrochemical reaction with a silicon-containing precursor material. An electrochemical cell generates H.sup.+ species which react with silicon from the precursor material to form a silane. The silane is used to deposit a silicon-containing article region. An apparatus for fabricating an article having a silicon-containing region is also provided. The fabrication system includes a reaction chamber having a gas supply line communicating with a silane-generating electrochemical cell. The electrochemical cell includes a first electrode for generating a supply of H.sup.+ ions, a silicon-containing precursor material in communication with the first electrode, a second electrode, and a receptacle for retaining an electrolyte. Advantageously, the present invention eliminates the need for long-term storage and transport of silane by generating silane at the site of device fabrication.

REFERENCES:
patent: 5246744 (1993-09-01), Matsuda et al.

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