Electrochemical formation of thin-film electrodes

Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge

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20412985, C25F 314

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active

047341742

ABSTRACT:
An electrode material on a substrate is patterned by forming an electrochemical cell from a pattern-forming master and from a substrate having an electrode starting film formed on a surface thereof. The pattern forming master and the substrate carrying the electrode starting film are brought together with an electrolyte therebetween, to define an electrochemical cell which is connected to an appropriate source of electrical energy to electrolytically remove selected areas of the electrode starting film to form the desired electrode pattern on the finished substrate. In one form, the pattern master includes a patterning surface having photolithographically formed insulated and conductive areas with the insulated areas corresponding to the finished electrode pattern on the substrate. In another form well suited for continuous production techniques, the pattern master is formed as a rotatably mounted cylindrical drum carrying conductive and insulated areas with the latter areas corresponding to the desired electrode pattern. The substrate is provided as an elongated web having an electrode starting film applied to one surface. The pattern master and the web are connected to a suitable source of electrical energy with the pattern master serving as the cathode and the electrode starting film serving as the anode. As the web is advanced into engagement with the surface of the rotating pattern master in the presence of an electrolyte, selected areas of the starting film are electrochemically removed to produce a series of electrode patterns on the substrate web.

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