Electrochemical fine processing apparatus

Details Electrochemical fine processing apparatus Electrochemical fine processing apparatus

1993-03-29

1994-09-06

Valentine, Donald R.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204227, 204231, C25F 302, C25F 700

Patent

active

053445392

ABSTRACT:
An electrochemical fine processing apparatus for electrochemically performing an adding processing and a removing processing of a substance such as a metal or a polymer in a solution in order to produce a structure having a high aspect ratio. Removing electrodes for applying an electric potential opposite to that applied to an addition electrode are disposed around the addition electrode, whereby an excess portion of metal or polymer film pattern can be scraped electrochemically. In addition, alternate electric potential pulses are applied successively to the addition electrode and then to the removing electrodes. It becomes possible to form on the support a structure with sharp pattern edge portions and a high aspect ratio.

REFERENCES:
patent: 2399289 (1946-04-01), Negus
patent: 2862863 (1958-12-01), Griffith
patent: 3445354 (1969-05-01), Carnell et al.
patent: 3852176 (1974-12-01), Rosenthal
patent: 3873512 (1975-03-01), Latanision

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