Chemistry: electrical and wave energy – Processes and products
Patent
1983-04-04
1986-01-14
Tufariello, Thomas
Chemistry: electrical and wave energy
Processes and products
20412935, 2041297, 20412985, C25D 1132, C25F 312, C25F 330
Patent
active
045644250
ABSTRACT:
In this disclosure there is described a novel method for using electrochemical etching to finely polish the surface of a (Hg,Cd)Te substrate resulting in a defect-free infrared detector with enhanced electronic properties. The fine surface polishing is obtained by etching at optimal levels of current density and electrolyte agitation.
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Manly et al, Semiconductor Surfaces, Wiley and Sons, Inc, New York, 1965, pp. 117-122.
Nemirovsky et al, "Anodic Oxide Films on Hg.sub.1-x Cd.sub.x Te", J. Electrochem Soc, May, 1979, pp. 768-770.
Thrush, "A Method for Selective Substrate Removal from Thin P-Type Gallium Arsenide Layers", Journal of Physics E., vol. 7, No. 6, pp. 493-495, Jun. 1974.
Carscallen Richard C.
Janousek Bruce K.
Taylor Ronald L.
The Aerospace Corporation
Tufariello Thomas
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