Electrochemical etching apparatus and method for spirally etchin

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Local application of electrolyte

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Details

205686, 205672, 204212, 204224M, C25F 302, C25F 700

Patent

active

058659846

ABSTRACT:
Disclosed is an electrochemical etching apparatus including a fixture for holding a workpiece; a nozzle, positioned opposite the fixture and facing the workpiece, for impinging an etchant onto the workpiece; and an electrode for applying a voltage between the electrode and the workpiece; wherein, in operation, one of the fixture and nozzle are rotated and the nozzle is moved radially outwardly so that the workpiece is spirally etched. Also disclosed is a method of spirally etching a workpiece.

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patent: 5567304 (1996-10-01), Datta et al.

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