Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Treating electrolytic or nonelectrolytic coating after it is...
Reexamination Certificate
2006-04-18
2006-04-18
Ryan, Patrick Joseph (Department: 1745)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Treating electrolytic or nonelectrolytic coating after it is...
C205S651000, C205S668000, C204S22400M, C204S22400M
Reexamination Certificate
active
07029567
ABSTRACT:
An edge cleaning system and method is disclosed in which a directed stream of a mild etching solution is supplied to an edge area of a rotating workpiece, including the front surface edge and bevel, while a potential difference between the workpiece and the directed stream is maintained. In one aspect, the present invention provides an edge cleaning system that is disposed in the same processing chamber that is used for deposition or removal processing of the workpiece. In another aspect, the mild etching solution used for edge removal is also used to clean the front surface of the wafer, either simultaneously with or sequentially with the edge removal process.
REFERENCES:
patent: 6056869 (2000-05-01), Uzoh
patent: 6309981 (2001-10-01), Mayer et al.
patent: 6352623 (2002-03-01), Volodarsky et al.
patent: 6610190 (2003-08-01), Basol et al.
patent: 6615854 (2003-09-01), Hongo et al.
patent: 6883063 (2004-12-01), Basol
Asm Nutool, Inc.
Knobbe Martens Olson & Bear LLP
Parsons Thomas H.
Ryan Patrick Joseph
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