Electro-wetting device and a method of manufacturing the same

Details Electro-wetting device and a method of manufacturing the same Electro-wetting device and a method of manufacturing the same

2008-02-04

2011-12-20

Schwartz, Jordan (Department: 2873)

Optical: systems and elements

Lens

Fluid

Reexamination Certificate

active

08081389

ABSTRACT:
An electro-wetting device is provided that can prevent deterioration of withstand voltage characteristics due to use of a high-dielectric constant film, thereby ensuring an insulating structure having high reliability. The electro-wetting device includes a conductive first liquid, an insulating second liquid, a transparent substrate and a cover body defining a liquid room for accommodating therein the first and second liquids, an electrode layer formed on a surface, on the liquid room side, of the transparent substrate, and an insulating layer formed on a surface of the electrode layer. The insulating layer has a lamination structure of a first insulating film made of an insulating inorganic crystalline material, and a second insulating film made of an insulating inorganic amorphous material, which results in that surface irregularities of the first insulating film is relaxed by the second insulating film, and thus the low voltage drive is possible. As a result, it is possible to obtain the highly reliable insulating layer which is excellent in the withstand voltage strength.

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