Electro-optical system for gauging surface profile deviations us

Details Electro-optical system for gauging surface profile deviations us Electro-optical system for gauging surface profile deviations us

1993-10-13

1995-10-31

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356371, 356243, 250330, G01B 1100, G01J 102

Patent

active

054634644

ABSTRACT:
A system for gauging the surface of a test object includes an image sensor, such as a camera, positioned to receive an image of the radiation naturally emitted from the test object through an attenuating medium. The intensity of such radiation varies across the image as a function of the deviation of the test object surface from a nominal surface profile. The sensor output is digitized to form a set of digital signals indicative of the intensity of radiation across the image, and the digitized signals are stored in digital electronic memory and/or displayed on a screen. Methods for correcting optically generated errors in the image are disclosed that, together with the gauging system, provide a quantitative measurement of the deviations in a test object surface profile from a preselected profile.

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