Electro-optical method for measuring gaps and lines

Details Electro-optical method for measuring gaps and lines Electro-optical method for measuring gaps and lines

1974-07-11

1976-02-10

Smith, Alfred E.

Optics: measuring and testing

Angle measuring or angular axial alignment

With photodetection remote from measured angle

250550, 350162SF, 356111, G01B 1102

Patent

active

039375803

ABSTRACT:
Rather than counting nulls in the diffraction pattern generated by a very narrow line or gap in order to measure its width, the diffraction pattern is optically detected and converted to an analog electrical signal constituting a function of the detected intensities in the diffraction pattern. This function is then converted to a digital form, stored, and then passed to a computer electrically computing the Fourier transform to provide an autocorrelation wave form. This wave form is then plotted in an orthogonal X-Y coordinate system and the break point or extension of a linear segment of the autocorrelation curve relative to the X-axis used to provide a precise measurement of the given width.

REFERENCES:
patent: 2959105 (1960-11-01), Sayanagi
patent: 3090281 (1963-05-01), Marechal et al.
patent: 3773401 (1973-11-01), Douklias et al.
patent: 3788749 (1974-01-01), George

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